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Digital 300 Series Mass Flow Meters and Mass Flow Controllers (Low Flow)

The Digital 300 Series of thermal mass flow meters and controllers from Teledyne are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ± (0.5% of reading + 0.2% of full scale) for full-scale flow rates from 0-5 sccm to 0-25 slm.

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FEATURES

  • Range 0 – 5 sccm to 0-25 slm (N2 Equivalent)
  • Excellent Accuracy: ±(0.5% of Reading + 0.2% of Full Scale)
  • All-Metal Seals
  • HFC-D-302 Valve Features Kalrez® Seat
  • Touchscreen Display/Control Option
  • 0-5 VDC, 0-10 VDC, 0-20 mA or 4-20 mA I/O
  • RS232 / RS485
  • Typical Settling Time:
  • HFM-D-300 < 1 second
  • HFC-D-302 1 –2 seconds
  • Status LEDs
  • Auto-Zero (HFC-D-302 Controller Only)
  • Totalizer
  • Large Diameter Sensor Tube (low dP)
  • Low Wetted Surface Area
  • Operating Pressures to 500 psi or higher
  • NIST Traceable Calibration

APPLICATIONS

  • Leak Testing
  • High Purity Gas Delivery
  • Thin Film Deposition
  • Gas Blending
  • Pharmaceutical
  • Fuel Cell R&D
  • Environmental Monitoring
  • Medical Research

BENEFITS

  • High Accuracy
  • Fast Metering Response
  • Superior Linearity
  • Rapid Controller Settling Time
  • Digital Extended Range
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